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Chuchvaga N, А.V. А, Titov А, Tokmoldin N, Tokmoldin S, Terukov Е. INVESTIGATION OF PASSIVATION OF SURFACE STATES OF SINGLE CRYSTALLINE SILICON IN HETEROSTRUCTURES WITH AN INTEGRATED THIN AMORPHOUS LAYER. PMS [Интернет]. 22 сентябрь 2020 г. [цитируется по 23 декабрь 2024 г.];(5):95-101. доступно на: http://89.250.84.46/physics-mathematics/article/view/627